SOI wafer

4" 6" 8" SOI wafer

SOI wafers apply to a wide range of products across a broad base of industries like MEMS and CMOS integrated circuit fabrication.

Commonly, SOI wafers can deliver better performance on SOI devices. 


Items

4"

6"

8"

Unit

Diameter

100

150

200

mm

Type / Dopant

                                                P - type :Boron                                                                                           N - type : Phosphorus / Arsenic / Antimony

 

Resistivity

0.001 ~ 10000      

.cm

Orientation

<100> or <111>

degree

Flat Orientation

<110>

degree

SOI Thickness

2µm ~ 100µm

2µm ~ 100µm

100nm ~ 10µm

µm

BOX Thickness

100nm ~ 3µm

 

 Handle Thickness

> 300

µm

Thickness Tolerance

± 5 %

µm

Front Side Surface

Polished

 

Back Side Surface

1. Etched 2. Polished